Assignee
NANOMETRICS INC
US·127 granted patents·8 pending applications·4,402 citations·filing 1978–2019
Top patents by PatentIndex Score
135 records- 0198US5625170APrecision weighing to monitor the thickness and uniformity of deposited or etched thin filmNANOMETRICS INC·Filed 1994·Granted Apr 29, 1997·157 cites·16 claims
- 0297US7301623B1Transferring, buffering and measuring a substrate in a metrology systemNANOMETRICS INC·Filed 2003·Granted Nov 27, 2007·410 cites·30 claims
- 0397US7061615B1Spectroscopically measured overlay targetNANOMETRICS INC·Filed 2001·Granted Jun 13, 2006·221 cites·13 claims
- 0497US6982793B1Method and apparatus for using an alignment target with designed in offsetNANOMETRICS INC·Filed 2002·Granted Jan 3, 2006·216 cites·49 claims
- 0597US6657216B1Dual spot confocal displacement sensorNANOMETRICS INC·Filed 2002·Granted Dec 2, 2003·121 cites·62 claims
- 0696US7469164B2Method and apparatus for process control with in-die metrologyNANOMETRICS INC·Filed 2007·Granted Dec 23, 2008·98 cites·32 claims
- 0796US7433034B1Darkfield defect inspection with spectral contentsNANOMETRICS INC·Filed 2005·Granted Oct 7, 2008·58 cites·32 claims
- 0896US7372565B1Spectrometer measurement of diffracting structuresNANOMETRICS INC·Filed 2006·Granted May 13, 2008·46 cites·24 claims
- 0996US7236244B1Alignment target to be measured with multiple polarization statesNANOMETRICS INC·Filed 2005·Granted Jun 26, 2007·36 cites·15 claims
- 1096US6992764B1Measuring an alignment target with a single polarization stateNANOMETRICS INC·Filed 2002·Granted Jan 31, 2006·115 cites·24 claims
- 1196US6949462B1Measuring an alignment target with multiple polarization statesNANOMETRICS INC·Filed 2002·Granted Sep 27, 2005·77 cites·18 claims
- 1296US6522406B1Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizerNANOMETRICS INC·Filed 2001·Granted Feb 18, 2003·119 cites·16 claims
- 1395US7046361B1Positioning two elements using an alignment target with a designed offsetNANOMETRICS INC·Filed 2002·Granted May 16, 2006·75 cites·25 claims
- 1494US7230705B1Alignment target with designed in offsetNANOMETRICS INC·Filed 2005·Granted Jun 12, 2007·69 cites·27 claims
- 1594US6856384B1Optical metrology system with combined interferometer and ellipsometerNANOMETRICS INC·Filed 2001·Granted Feb 15, 2005·85 cites·25 claims
- 1693US9547244B2Simultaneous measurement of multiple overlay errors using diffraction based overlayNANOMETRICS INC·Filed 2015·Granted Jan 17, 2017·5 cites·26 claims
- 1793US6713753B1Combination of normal and oblique incidence polarimetry for the characterization of gratingsNANOMETRICS INC·Filed 2001·Granted Mar 30, 2004·66 cites·20 claims
- 1893US5943122AIntegrated optical measurement instrumentsNANOMETRICS INC·Filed 1998·Granted Aug 24, 1999·197 cites·26 claims
- 1993US4926227ASensor devices with internal packaged coolersNANOMETRICS INC·Filed 1986·Granted May 15, 1990·112 cites·2 claims
- 2093US4627009AMicroscope stage assembly and control systemNANOMETRICS INC·Filed 1983·Granted Dec 2, 1986·94 cites·7 claims
- 2192US7504642B2Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpieceNANOMETRICS INC·Filed 2006·Granted Mar 17, 2009·24 cites·19 claims
- 2292US7502101B2Apparatus and method for enhanced critical dimension scatterometryNANOMETRICS INC·Filed 2006·Granted Mar 10, 2009·20 cites·43 claims
- 2392US7115858B1Apparatus and method for the measurement of diffracting structuresNANOMETRICS INC·Filed 2000·Granted Oct 3, 2006·55 cites·16 claims
- 2492US6573999B1Film thickness measurements using light absorptionNANOMETRICS INC·Filed 2000·Granted Jun 3, 2003·83 cites·14 claims
- 2591US6925860B1Leveling a measured height profileNANOMETRICS INC·Filed 2003·Granted Aug 9, 2005·57 cites·20 claims
- 2691US6898537B1Measurement of diffracting structures using one-half of the non-zero diffracted ordersNANOMETRICS INC·Filed 2001·Granted May 24, 2005·59 cites·46 claims
- 2791US6665070B1Alignment of a rotatable polarizer with a sampleNANOMETRICS INC·Filed 2001·Granted Dec 16, 2003·40 cites·27 claims
- 2891US4849694AThickness measurements of thin conductive filmsNANOMETRICS INC·Filed 1986·Granted Jul 18, 1989·69 cites·4 claims
- 2990US7446868B1Micro defects in semi-conductorsNANOMETRICS INC·Filed 2006·Granted Nov 4, 2008·29 cites·20 claims
- 3090US6633389B1Profiling methodNANOMETRICS INC·Filed 2000·Granted Oct 14, 2003·47 cites·23 claims
- 3190USRE34783EMethod for determining absolute reflectance of a material in the ultraviolet rangeNANOMETRICS INC·Filed 1993·Granted Nov 8, 1994·81 cites·5 claims
- 3290US5045704AMethod for determining absolute reflectance of a material in the ultraviolet rangeNANOMETRICS INC·Filed 1990·Granted Sep 3, 1991·86 cites·5 claims
- 3390US4826321AThin dielectric film measuring systemNANOMETRICS INC·Filed 1988·Granted May 2, 1989·60 cites·10 claims
- 3490US4308586AMethod for the precise determination of photoresist exposure timeNANOMETRICS INC·Filed 1980·Granted Dec 29, 1981·49 cites·3 claims
- 3589US7477396B2Methods and systems for determining overlay error based on target image symmetryNANOMETRICS INC·Filed 2006·Granted Jan 13, 2009·14 cites·14 claims
- 3689US7379184B2Overlay measurement targetNANOMETRICS INC·Filed 2005·Granted May 27, 2008·28 cites·27 claims
- 3788US10288408B2Scanning white-light interferometry system for characterization of patterned semiconductor featuresNANOMETRICS INC·Filed 2016·Granted May 14, 2019·5 cites·35 claims
- 3888US7515279B2Line profile asymmetry measurementNANOMETRICS INC·Filed 2004·Granted Apr 7, 2009·34 cites·33 claims
- 3988US7061613B1Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulationNANOMETRICS INC·Filed 2004·Granted Jun 13, 2006·35 cites·24 claims
- 4088US4373817AComputerized micromeasuring system and method thereforNANOMETRICS INC·Filed 1978·Granted Feb 15, 1983·42 cites·17 claims
- 4187US7064828B1Pulsed spectroscopy with spatially variable polarization modulation elementNANOMETRICS INC·Filed 2001·Granted Jun 20, 2006·33 cites·16 claims
- 4287US4596929AThree-stage secondary emission electron detection in electron microscopesNANOMETRICS INC·Filed 1983·Granted Jun 24, 1986·33 cites·4 claims
- 4386US7446321B2Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpieceNANOMETRICS INC·Filed 2006·Granted Nov 4, 2008·13 cites·26 claims
- 4486US7005306B1Accurate thickness measurement of thin conductive filmNANOMETRICS INC·Filed 2003·Granted Feb 28, 2006·35 cites·10 claims
- 4586US6381009B1Elemental concentration measuring methods and instrumentsNANOMETRICS INC·Filed 1999·Granted Apr 30, 2002·92 cites·21 claims
- 4685US9958327B2Deconvolution to reduce the effective spot size of a spectroscopic optical metrology deviceNANOMETRICS INC·Filed 2014·Granted May 1, 2018·5 cites·42 claims
- 4785US6958819B1Encoder with an alignment targetNANOMETRICS INC·Filed 2002·Granted Oct 25, 2005·28 cites·45 claims
- 4884US9995689B2Optical metrology using differential fittingNANOMETRICS INC·Filed 2015·Granted Jun 12, 2018·3 cites·22 claims
- 4984US7847939B2Overlay measurement targetNANOMETRICS INC·Filed 2008·Granted Dec 7, 2010·12 cites·24 claims
- 5084US6181427B1Compact optical reflectometer systemNANOMETRICS INC·Filed 1999·Granted Jan 30, 2001·70 cites·18 claims
Showing the top 50 of 135 patent records by PatentIndex Score.
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