Assignee
NANOPHOTONICS AG
DE·9 granted patents·219 citations·filing 1999–2004
Top patents by PatentIndex Score
9 records- 0186US6420864B1Modular substrate measurement systemNANOPHOTONICS AG·Filed 2000·Granted Jul 16, 2002·43 cites·10 claims
- 0284US7284760B2Holding device for disk-shaped objectsNANOPHOTONICS AG·Filed 2004·Granted Oct 23, 2007·41 cites·19 claims
- 0378US6954267B2Device for measuring surface defectsNANOPHOTONICS AG·Filed 2002·Granted Oct 11, 2005·15 cites·18 claims
- 0477US6275291B1Micropolarimeter and ellipsometerNANOPHOTONICS AG·Filed 1999·Granted Aug 14, 2001·52 cites·15 claims
- 0569US6798513B2Measuring moduleNANOPHOTONICS AG·Filed 2002·Granted Sep 28, 2004·14 cites·2 claims
- 0668US6091499AMethod and device for automatic relative adjustment of samples in relation to an ellipsometerNANOPHOTONICS AG·Filed 1999·Granted Jul 18, 2000·44 cites·7 claims
- 0760US6935201B2Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locationsNANOPHOTONICS AG·Filed 2003·Granted Aug 30, 2005·8 cites·22 claims
- 0845US6891609B2Measurement box with module for measuring wafer characteristicsNANOPHOTONICS AG·Filed 2002·Granted May 10, 2005·1 cites·12 claims
- 0941US6734969B2Vacuum measurement deviceNANOPHOTONICS AG·Filed 2001·Granted May 11, 2004·1 cites·18 claims
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