Assignee
NARITA TAKENORI
JP·1 granted patent·1 pending application·1 citations·filing 2006–2008
Top patents by PatentIndex Score
2 records- 0152US8778803B2CPM slurry for silicon film polishing and polishing methodNARITA TAKENORI·Filed 2008·Granted Jul 15, 2014·1 cites·13 claims
- 0241US2006199021A1Composition, methods for forming low-permittivity film using the composition, low-permittivity film, and electronic part having the low-permittivity filmNARITA TAKENORI·Filed 2006·Application pending·0 cites
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