Assignee
NARWANKAR PRAVIN K
US·2 granted patents·1 pending application·15 citations·filing 2004–2012
Top patents by PatentIndex Score
3 records- 0169US8119210B2Formation of a silicon oxynitride layer on a high-k dielectric materialNARWANKAR PRAVIN K·Filed 2004·Granted Feb 21, 2012·13 cites·45 claims
- 0264US9305838B2BEOL interconnect with carbon nanotubesNARWANKAR PRAVIN K·Filed 2012·Granted Apr 5, 2016·2 cites·15 claims
- 0354US2010090294A1Tailoring nitrogen profile in silicon oxynitride using rapid thermal annealing with ammonia under ultra-low pressureNARWANKAR PRAVIN K·Filed 2009·Application pending·0 cites
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