Assignee
NAWATA RYO
JP·1 granted patent·2 pending applications·6 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0178US9052614B2Vibration control apparatus, lithography apparatus, and method of manufacturing articleNAWATA RYO·Filed 2011·Granted Jun 9, 2015·6 cites·18 claims
- 0236US2012314050A1Imaging apparatus and control method thereforNAWATA RYO·Filed 2012·Application pending·0 cites
- 0335US2012045723A1Vibration isolation device, exposure apparatus, and device manufacturing method using sameNAWATA RYO·Filed 2011·Application pending·0 cites
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