Assignee

NEURISTICS PHYSICS LAB INC

US·1 granted patent·3 citations·filing 2000–2000

Technology mixG01N1 G03F1 H10P1

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0138US6586263B2Correction of overlay offset between inspection layers in integrated circuitsNEURISTICS PHYSICS LAB INC·Filed 2000·Granted Jul 1, 2003·3 cites·15 claims

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