Assignee
NEXPLANAR CORP
US17 patents
Top patents by PatentIndex Score
US7704125B2Apr 27, 2010
Customized polishing pads for CMP and methods of fabrication and use thereof
NEXPLANAR CORP60 citations97
US9278424B2Mar 8, 2016
Customized polishing pads for CMP and methods of fabrication and use thereof
NEXPLANAR CORP32 citations94
US8380339B2Feb 19, 2013
Customized polish pads for chemical mechanical planarization
NEXPLANAR CORP27 citations93
US7704122B2Apr 27, 2010
Customized polish pads for chemical mechanical planarization
NEXPLANAR CORP29 citations93
US7425172B2Sep 16, 2008
Customized polish pads for chemical mechanical planarization
NEXPLANAR CORP36 citations93
US10220487B2Mar 5, 2019
Customized polishing pads for CMP and methods of fabrication and use thereof
NEXPLANAR CORP15 citations85
US9649742B2May 16, 2017
Polishing pad having polishing surface with continuous protrusions
NEXPLANAR CORP13 citations82
US10160092B2Dec 25, 2018
Polishing pad having polishing surface with continuous protrusions having tapered sidewalls
NEXPLANAR CORP5 citations71
US9272388B2Mar 1, 2016
Polishing systems
NEXPLANAR CORP2 citations63
US8383003B2Feb 26, 2013
Polishing systems
NEXPLANAR CORP2 citations63
US10946495B2Mar 16, 2021
Low density polishing pad
NEXPLANAR CORP0 citations62
US9597770B2Mar 21, 2017
Method of fabricating a polishing
NEXPLANAR CORP0 citations52
US9931728B2Apr 3, 2018
Polishing pad with foundation layer and polishing surface layer
NEXPLANAR CORP0 citations51
US9931729B2Apr 3, 2018
Polishing pad with grooved foundation layer and polishing surface layer
NEXPLANAR CORP0 citations51
US9597777B2Mar 21, 2017
Homogeneous polishing pad for eddy current end-point detection
NEXPLANAR CORP0 citations51
US9555518B2Jan 31, 2017
Polishing pad with multi-modal distribution of pore diameters
NEXPLANAR CORP0 citations51
US10293459B2May 21, 2019
Polishing pad having polishing surface with continuous protrusions
NEXPLANAR CORP0 citations50