Assignee
NGUYEN SON VAN
US·5 granted patents·31 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0190US8779600B2Interlevel dielectric stack for interconnect structuresNGUYEN SON VAN·Filed 2012·Granted Jul 15, 2014·8 cites·14 claims
- 0289US8299365B2Self-aligned composite M-MOx/dielectric cap for Cu interconnect structuresNGUYEN SON VAN·Filed 2010·Granted Oct 30, 2012·10 cites·19 claims
- 0386US8476743B2C-rich carbon boron nitride dielectric films for use in electronic devicesNGUYEN SON VAN·Filed 2011·Granted Jul 2, 2013·6 cites·16 claims
- 0482US9502288B2Method of forming an interconnect structureNGUYEN SON VAN·Filed 2012·Granted Nov 22, 2016·5 cites·10 claims
- 0568US8097932B2Ultra low κ plasma enhanced chemical vapor deposition processes using a single bifunctional precursor containing both a SiCOH matrix functionality and organic porogen functionalityNGUYEN SON VAN·Filed 2009·Granted Jan 17, 2012·2 cites·11 claims
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