Assignee
NGUYEN VICTOR
US4 patents
Top patents by PatentIndex Score
US8586487B2Nov 19, 2013
Low temperature plasma enhanced chemical vapor deposition of conformal silicon carbon nitride and silicon nitride films
NGUYEN VICTOR7 citations83
US8337950B2Dec 25, 2012
Method for depositing boron-rich films for lithographic mask applications
NGUYEN VICTOR9 citations82
US9984868B2May 29, 2018
PEALD of films comprising silicon nitride
NGUYEN VICTOR3 citations70
US8598020B2Dec 3, 2013
Plasma-enhanced chemical vapor deposition of crystalline germanium
NGUYEN VICTOR1 citations51