Assignee
NI TUQIANG
US·4 granted patents·20 citations·filing 2005–2011
Top patents by PatentIndex Score
4 records- 0184US8111499B2System and method of sensing and removing residual charge from a processed waferNI TUQIANG·Filed 2009·Granted Feb 7, 2012·13 cites·23 claims
- 0280US8114246B2Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating sameNI TUQIANG·Filed 2006·Granted Feb 14, 2012·4 cites·20 claims
- 0371US8480913B2Plasma processing method and apparatus with control of plasma excitation powerNI TUQIANG·Filed 2011·Granted Jul 9, 2013·2 cites·50 claims
- 0462US8518211B2System and method for controlling plasma with an adjustable coupling to ground circuitNI TUQIANG·Filed 2005·Granted Aug 27, 2013·1 cites·16 claims
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