Assignee
NIKON CORPORATIOIN
JP·2 granted patents·105 citations·filing 1996–1997
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0191US5841520AExposure apparatus and method that use mark patterns to determine image formation characteristics of the apparatus prior to exposureNIKON CORPORATIOIN·Filed 1996·Granted Nov 24, 1998·97 cites·68 claims
- 0242US5985496AExposure method and apparatusNIKON CORPORATIOIN·Filed 1997·Granted Nov 16, 1999·8 cites·18 claims
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