Assignee
NISHIKAWA JIN
JP·1 granted patent·1 pending application·3 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0164US8576375B2Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatusNISHIKAWA JIN·Filed 2008·Granted Nov 5, 2013·3 cites·27 claims
- 0238US2009103063A1Cooling apparatus for optical member, barrel, exposure apparatus, and device manufacturing methodNISHIKAWA JIN·Filed 2008·Application pending·0 cites
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