Assignee
NISHIMOTO SHINYA
JP6 patents
Top patents by PatentIndex Score
US8968512B2Mar 3, 2015
Temperature adjusting mechanism and semiconductor manufacturing apparatus using temperature adjusting mechanism
NISHIMOTO SHINYA9 citations83
US8057600B2Nov 15, 2011
Method and apparatus for an improved baffle plate in a plasma processing system
NISHIMOTO SHINYA12 citations83
US8485127B2Jul 16, 2013
Processing apparatus
NISHIMOTO SHINYA8 citations81
US8242405B2Aug 14, 2012
Microwave plasma processing apparatus and method for producing cooling jacket
NISHIMOTO SHINYA2 citations61
US8171880B2May 8, 2012
Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
NISHIMOTO SHINYA2 citations61
US8327795B2Dec 11, 2012
Microwave plasma processing apparatus and method of supplying microwaves using the apparatus
NISHIMOTO SHINYA0 citations40