Assignee
NISHIMURA KAZUHIRO
JP·2 granted patents·6 citations·filing 2012–2013
Top patents by PatentIndex Score
2 records- 0186US9152054B2Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing methodNISHIMURA KAZUHIRO·Filed 2013·Granted Oct 6, 2015·6 cites·14 claims
- 0242US9494877B2Substrate processing apparatusNISHIMURA KAZUHIRO·Filed 2012·Granted Nov 15, 2016·0 cites·10 claims
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