Assignee
NISHIMURA YUKIO
JP·2 granted patents·2 pending applications·5 citations·filing 2007–2012
Top patents by PatentIndex Score
4 records- 0159US8124314B2Radiation-sensitive compositionNISHIMURA YUKIO·Filed 2010·Granted Feb 28, 2012·4 cites·3 claims
- 0256US8895229B2Composition for formation of upper layer film, and method for formation of photoresist patternNISHIMURA YUKIO·Filed 2007·Granted Nov 25, 2014·1 cites·5 claims
- 0347US2010068650A1Positive-working radiation-sensitive composition and method for resist pattern formation using the compositionNISHIMURA YUKIO·Filed 2008·Application pending·0 cites
- 0447US2012164586A1Patern forming methodNISHIMURA YUKIO·Filed 2012·Application pending·0 cites
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