Assignee
NISHINAGA HISASHI
JP·2 granted patents·15 citations·filing 2006–2006
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0189US8305552B2Exposure apparatus, exposure method, and method for producing deviceNISHINAGA HISASHI·Filed 2006·Granted Nov 6, 2012·10 cites·20 claims
- 0283US8139198B2Exposure apparatus, exposure method, and method for producing deviceNISHINAGA HISASHI·Filed 2006·Granted Mar 20, 2012·5 cites·12 claims
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