Assignee
NISHISAKA TOSHIHIRO
JP·3 granted patents·8 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0171US8759804B2Chamber apparatus and extreme ultraviolet light generation systemNISHISAKA TOSHIHIRO·Filed 2011·Granted Jun 24, 2014·3 cites·18 claims
- 0265US8698111B2Extreme ultraviolet light generation systemNISHISAKA TOSHIHIRO·Filed 2011·Granted Apr 15, 2014·2 cites·9 claims
- 0358US9052615B2Extreme ultraviolet light source apparatusNISHISAKA TOSHIHIRO·Filed 2009·Granted Jun 9, 2015·3 cites·17 claims
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