Assignee

NOGAMI MITSUHIDE

JP·1 granted patent·11 citations·filing 2007–2007

Technology mixC23C1 H01J1 H10P1

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0182US8262846B2Plasma processing apparatus and method thereofNOGAMI MITSUHIDE·Filed 2007·Granted Sep 11, 2012·11 cites·12 claims

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