Assignee
NOLLER BASTIAN MARTEN
DE·2 granted patents·2 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0156US9443739B2Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of elemental germanium and/or Si1-xGex material in the presence of a CMP composition comprising a specific organic compoundNOLLER BASTIAN MARTEN·Filed 2012·Granted Sep 13, 2016·2 cites·17 claims
- 0235US10407594B2Chemical mechanical polishing (CMP) composition comprising a polymeric polyamineNOLLER BASTIAN MARTEN·Filed 2012·Granted Sep 10, 2019·0 cites·12 claims
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