Assignee
NOVA LTD
IL·53 granted patents·28 pending applications·19 citations·filing 2016–2025
Top patents by PatentIndex Score
81 records- 0193US11763181B2Metrology and process control for semiconductor manufacturingNOVA LTD·Filed 2021·Granted Sep 19, 2023·3 cites·20 claims
- 0292US12066385B2Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2022·Granted Aug 20, 2024·1 cites·16 claims
- 0392US11802829B2Method and system for broadband photoreflectance spectroscopyNOVA LTD·Filed 2020·Granted Oct 31, 2023·2 cites·10 claims
- 0492US11740183B2Accurate Raman spectroscopyNOVA LTD·Filed 2020·Granted Aug 29, 2023·2 cites·30 claims
- 0592US2025389665A1Hybrid metrology method and systemNOVA LTD·Filed 2025·Application pending·0 cites
- 0691US11293871B2Raman spectroscopy based measurement systemNOVA LTD·Filed 2018·Granted Apr 5, 2022·3 cites·26 claims
- 0790US12366533B2Hybrid metrology method and systemNOVA LTD·Filed 2024·Granted Jul 22, 2025·0 cites·23 claims
- 0890US2025123210A1Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2024·Application pending·0 cites
- 0989US2025130172A1Accurate raman spectroscopyNOVA LTD·Filed 2024·Application pending·0 cites
- 1088US12467879B2Optical phase measurement method and systemNOVA LTD·Filed 2024·Granted Nov 11, 2025·0 cites·16 claims
- 1188US2025054128A1Method and system for optimizing optical inspection of patterned structuresNOVA LTD·Filed 2024·Application pending·0 cites
- 1287US12163892B2Accurate Raman spectroscopyNOVA LTD·Filed 2023·Granted Dec 10, 2024·0 cites·18 claims
- 1386US12298182B2Optical technique for material characterizationNOVA LTD·Filed 2024·Granted May 13, 2025·0 cites·20 claims
- 1485US12467869B2Raman spectroscopy based measurement systemNOVA LTD·Filed 2024·Granted Nov 11, 2025·0 cites·20 claims
- 1585US12372473B2Accurate Raman spectroscopyNOVA LTD·Filed 2024·Granted Jul 29, 2025·0 cites·18 claims
- 1684US11885737B2Method and system for optical characterization of patterned samplesNOVA LTD·Filed 2020·Granted Jan 30, 2024·1 cites·8 claims
- 1784US11143601B2Test structure design for metrology measurements in patterned samplesNOVA LTD·Filed 2019·Granted Oct 12, 2021·2 cites·8 claims
- 1884US2024337590A1Method and system for optical characterization of patterned samplesNOVA LTD·Filed 2024·Application pending·0 cites
- 1983US11946875B2Optical phase measurement system and methodNOVA LTD·Filed 2022·Granted Apr 2, 2024·0 cites·20 claims
- 2083US2026010081A1Optical metrology system and methodNOVA LTD·Filed 2025·Application pending·0 cites
- 2182US11860104B2Accurate raman spectroscopyNOVA LTD·Filed 2022·Granted Jan 2, 2024·0 cites·19 claims
- 2282US2023401690A1Method and system for optimizing optical inspection of patterned structuresNOVA LTD·Filed 2023·Application pending·0 cites
- 2381US12360462B2Optical metrology system and methodNOVA LTD·Filed 2024·Granted Jul 15, 2025·0 cites·6 claims
- 2481US11927481B2Optical technique for material characterizationNOVA LTD·Filed 2022·Granted Mar 12, 2024·0 cites·22 claims
- 2580US12236364B2Metrology and process control for semiconductor manufacturingNOVA LTD·Filed 2023·Granted Feb 25, 2025·0 cites·18 claims
- 2680US12196691B2X-ray based measurements in patterned structureNOVA LTD·Filed 2023·Granted Jan 14, 2025·0 cites·21 claims
- 2779US12025560B2Hybrid metrology method and systemNOVA LTD·Filed 2021·Granted Jul 2, 2024·0 cites·24 claims
- 2879US2026079049A1Systems and methods for optical metrologyNOVA LTD·Filed 2025·Application pending·0 cites
- 2978US12152993B2Accurate Raman spectroscopyNOVA LTD·Filed 2021·Granted Nov 26, 2024·0 cites·20 claims
- 3078US11906434B2Raman spectroscopy based measurement systemNOVA LTD·Filed 2022·Granted Feb 20, 2024·0 cites·15 claims
- 3177US11906451B2Method and system for non-destructive metrology of thin layersNOVA LTD·Filed 2021·Granted Feb 20, 2024·0 cites·20 claims
- 3276US12321102B2Machine and deep learning methods for spectra-based metrology and process controlNOVA LTD·Filed 2023·Granted Jun 3, 2025·0 cites·18 claims
- 3376US2025334887A1Machine and deep learning methods for spectra-based metrology and process controlNOVA LTD·Filed 2025·Application pending·0 cites
- 3476US2025027767A1Detecting outliers and anomalies for ocd metrology machine learningNOVA LTD·Filed 2024·Application pending·0 cites
- 3575US11150190B2Hybrid metrology method and systemNOVA LTD·Filed 2020·Granted Oct 19, 2021·0 cites·24 claims
- 3675US2025181941A1Metrology and process control for semiconductor manufacturingNOVA LTD·Filed 2025·Application pending·0 cites
- 3774US11710616B2TEM-based metrology method and systemNOVA LTD·Filed 2022·Granted Jul 25, 2023·0 cites·22 claims
- 3874US11639901B2Test structure design for metrology measurements in patterned samplesNOVA LTD·Filed 2021·Granted May 2, 2023·0 cites·11 claims
- 3974US11415519B2Accurate Raman spectroscopyNOVA LTD·Filed 2020·Granted Aug 16, 2022·0 cites·20 claims
- 4073US11692953B2X-ray based measurements in patterned structureNOVA LTD·Filed 2021·Granted Jul 4, 2023·0 cites·20 claims
- 4173US11275027B2Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 4273US11107738B2Layer detection for high aspect ratio etch controlNOVA LTD·Filed 2017·Granted Aug 31, 2021·2 cites·20 claims
- 4370US12152869B2Monitoring system and method for verifying measurements in patterned structuresNOVA LTD·Filed 2021·Granted Nov 26, 2024·0 cites·22 claims
- 4469US11868054B2Optical metrology system and methodNOVA LTD·Filed 2021·Granted Jan 9, 2024·0 cites·15 claims
- 4569US11460415B2Optical phase measurement system and methodNOVA LTD·Filed 2020·Granted Oct 4, 2022·0 cites·18 claims
- 4669US11450541B2Metrology method and systemNOVA LTD·Filed 2018·Granted Sep 20, 2022·1 cites·19 claims
- 4768US2024069445A1Self-supervised representation learning for interpretation of ocd dataNOVA LTD·Filed 2023·Application pending·0 cites
- 4867US11994374B2Integrated measurement systemNOVA LTD·Filed 2019·Granted May 28, 2024·2 cites·21 claims
- 4967US11309162B2TEM-based metrology method and systemNOVA LTD·Filed 2021·Granted Apr 19, 2022·0 cites·5 claims
- 5066US11543294B2Optical technique for material characterizationNOVA LTD·Filed 2019·Granted Jan 3, 2023·0 cites·14 claims
Showing the top 50 of 81 patent records by PatentIndex Score.
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