Assignee
NOVA LTD
IL53 patents
Top patents by PatentIndex Score
US12066385B2Aug 20, 2024
Raman spectroscopy based measurements in patterned structures
NOVA LTD1 citations72
US11802829B2Oct 31, 2023
Method and system for broadband photoreflectance spectroscopy
NOVA LTD2 citations72
US11293871B2Apr 5, 2022
Raman spectroscopy based measurement system
NOVA LTD3 citations72
US11143601B2Oct 12, 2021
Test structure design for metrology measurements in patterned samples
NOVA LTD2 citations72
US11740183B2Aug 29, 2023
Accurate Raman spectroscopy
NOVA LTD2 citations70
US11763181B2Sep 19, 2023
Metrology and process control for semiconductor manufacturing
NOVA LTD3 citations68
US11107738B2Aug 31, 2021
Layer detection for high aspect ratio etch control
NOVA LTD2 citations66
US12366533B2Jul 22, 2025
Hybrid metrology method and system
NOVA LTD0 citations62
US12298182B2May 13, 2025
Optical technique for material characterization
NOVA LTD0 citations62
US12196691B2Jan 14, 2025
X-ray based measurements in patterned structure
NOVA LTD0 citations62
US12025560B2Jul 2, 2024
Hybrid metrology method and system
NOVA LTD0 citations62
US11927481B2Mar 12, 2024
Optical technique for material characterization
NOVA LTD0 citations62
US11692953B2Jul 4, 2023
X-ray based measurements in patterned structure
NOVA LTD0 citations62
US11639901B2May 2, 2023
Test structure design for metrology measurements in patterned samples
NOVA LTD0 citations62
US11543294B2Jan 3, 2023
Optical technique for material characterization
NOVA LTD0 citations62
US11275027B2Mar 15, 2022
Raman spectroscopy based measurements in patterned structures
NOVA LTD0 citations62
US11150190B2Oct 19, 2021
Hybrid metrology method and system
NOVA LTD0 citations62
US12467879B2Nov 11, 2025
Optical phase measurement method and system
NOVA LTD0 citations61
US12467869B2Nov 11, 2025
Raman spectroscopy based measurement system
NOVA LTD0 citations61
US12152869B2Nov 26, 2024
Monitoring system and method for verifying measurements in patterned structures
NOVA LTD0 citations61
US11946875B2Apr 2, 2024
Optical phase measurement system and method
NOVA LTD0 citations61
US11906451B2Feb 20, 2024
Method and system for non-destructive metrology of thin layers
NOVA LTD0 citations61
US11906434B2Feb 20, 2024
Raman spectroscopy based measurement system
NOVA LTD0 citations61
US11460415B2Oct 4, 2022
Optical phase measurement system and method
NOVA LTD0 citations61
US11335612B2May 17, 2022
Apparatus and method for electrical test prediction
NOVA LTD0 citations61
US12360462B2Jul 15, 2025
Optical metrology system and method
NOVA LTD0 citations60
US11994374B2May 28, 2024
Integrated measurement system
NOVA LTD2 citations60
US11868054B2Jan 9, 2024
Optical metrology system and method
NOVA LTD0 citations60
US12372473B2Jul 29, 2025
Accurate Raman spectroscopy
NOVA LTD0 citations59
US12321102B2Jun 3, 2025
Machine and deep learning methods for spectra-based metrology and process control
NOVA LTD0 citations59
US12163892B2Dec 10, 2024
Accurate Raman spectroscopy
NOVA LTD0 citations59
US12152993B2Nov 26, 2024
Accurate Raman spectroscopy
NOVA LTD0 citations59
US11885737B2Jan 30, 2024
Method and system for optical characterization of patterned samples
NOVA LTD1 citations59
US11860104B2Jan 2, 2024
Accurate raman spectroscopy
NOVA LTD0 citations59
US11815819B2Nov 14, 2023
Machine and deep learning methods for spectra-based metrology and process control
NOVA LTD0 citations59
US11415519B2Aug 16, 2022
Accurate Raman spectroscopy
NOVA LTD0 citations59
US12236364B2Feb 25, 2025
Metrology and process control for semiconductor manufacturing
NOVA LTD0 citations58
US11710616B2Jul 25, 2023
TEM-based metrology method and system
NOVA LTD0 citations58
US11450541B2Sep 20, 2022
Metrology method and system
NOVA LTD1 citations58
US11309162B2Apr 19, 2022
TEM-based metrology method and system
NOVA LTD0 citations58
US11929291B2Mar 12, 2024
Layer detection for high aspect ratio etch control
NOVA LTD0 citations56
US11900028B2Feb 13, 2024
Scatterometry system and method
NOVA LTD0 citations54
US12498332B2Dec 16, 2025
Imaging metrology
NOVA LTD0 citations53
US12392733B2Aug 19, 2025
Combined ocd and photoreflectance method and system
NOVA LTD0 citations51
US12359968B2Jul 15, 2025
Systems and methods for optical metrology
NOVA LTD0 citations50
US11874606B2Jan 16, 2024
System and method for controlling measurements of sample's parameters
NOVA LTD0 citations46
US11747740B2Sep 5, 2023
Self-supervised representation learning for interpretation of OCD data
NOVA LTD0 citations45
US12547082B2Feb 10, 2026
Combining physical modeling and machine learning
NOVA LTD0 citations44
US11512943B2Nov 29, 2022
Optical system and method for measuring parameters of patterned structures in micro-electronic devices
NOVA LTD0 citations44
US11366398B2Jun 21, 2022
Time-domain optical metrology and inspection of semiconductor devices
NOVA LTD0 citations44
Showing the top 50 of 53 patents by PatentIndex Score.