Assignee

NOVA MEASURING INSTR

IL·2 granted patents·20 citations·filing 2003–2007

Technology mixG01B2 G01N2 G03F2

Top patents by PatentIndex Score

2 records

0183US7626711B2Method and system for measuring patterned structuresNOVA MEASURING INSTR·Filed 2007·Granted Dec 1, 2009·4 cites·24 claims
0278US7184152B2Optical measurements of line edge roughnessNOVA MEASURING INSTR·Filed 2003·Granted Feb 27, 2007·16 cites·13 claims

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