Assignee
NUMERICAL TECH INC
US70 patents
Top patents by PatentIndex Score
US6787271B2Sep 7, 2004
Design and layout of phase shifting photolithographic masks
NUMERICAL TECH INC84 citations99
US6777138B2Aug 17, 2004
Mask product made by selection of evaluation point locations based on proximity effects model amplitudes for correcting proximity effects in a fabricat layout
NUMERICAL TECH INC209 citations99
US6687895B2Feb 3, 2004
Method and apparatus for reducing optical proximity correction output file size
NUMERICAL TECH INC296 citations99
US6665856B1Dec 16, 2003
Displacing edge segments on a fabrication layout based on proximity effects model amplitudes for correcting proximity effects
NUMERICAL TECH INC115 citations99
US6470489B1Oct 22, 2002
Design rule checking system and method
NUMERICAL TECH INC516 citations99
US6453452B1Sep 17, 2002
Method and apparatus for data hierarchy maintenance in a system for mask description
NUMERICAL TECH INC186 citations99
US6453457B1Sep 17, 2002
Selection of evaluation point locations based on proximity effects model amplitudes for correcting proximity effects in a fabrication layout
NUMERICAL TECH INC277 citations99
US6370679B1Apr 9, 2002
Data hierarchy layout correction and verification method and apparatus
NUMERICAL TECH INC498 citations99
US5858580AJan 12, 1999
Phase shifting circuit manufacture method and apparatus
NUMERICAL TECH INC553 citations99
US6807663B2Oct 19, 2004
Accelerated layout processing using OPC pre-processing
NUMERICAL TECH INC230 citations98
US6792590B1Sep 14, 2004
Dissection of edges with projection points in a fabrication layout for correcting proximity effects
NUMERICAL TECH INC78 citations98
US6753115B2Jun 22, 2004
Facilitating minimum spacing and/or width control optical proximity correction
NUMERICAL TECH INC76 citations98
US6745372B2Jun 1, 2004
Method and apparatus for facilitating process-compliant layout optimization
NUMERICAL TECH INC243 citations98
US6684382B2Jan 27, 2004
Microloading effect correction
NUMERICAL TECH INC72 citations98
US6625801B1Sep 23, 2003
Dissection of printed edges from a fabrication layout for correcting proximity effects
NUMERICAL TECH INC91 citations98
US6539521B1Mar 25, 2003
Dissection of corners in a fabrication layout for correcting proximity effects
NUMERICAL TECH INC84 citations98
US6436590B2Aug 20, 2002
Phase shifting circuit manufacture method and apparatus
NUMERICAL TECH INC82 citations98
US6258493B1Jul 10, 2001
Phase shifting circuit manufacture method and apparatus
NUMERICAL TECH INC101 citations98
US6228539B1May 8, 2001
Phase shifting circuit manufacture method and apparatus
NUMERICAL TECH INC108 citations98
US6757645B2Jun 29, 2004
Visual inspection and verification system
NUMERICAL TECH INC207 citations97
US6584609B1Jun 24, 2003
Method and apparatus for mixed-mode optical proximity correction
NUMERICAL TECH INC99 citations97
US6560766B2May 6, 2003
Method and apparatus for analyzing a layout using an instance-based representation
NUMERICAL TECH INC82 citations97
US6505327B2Jan 7, 2003
Generating an instance-based representation of a design hierarchy
NUMERICAL TECH INC346 citations97
US6733929B2May 11, 2004
Phase shift masking for complex patterns with proximity adjustments
NUMERICAL TECH INC61 citations96
US6721938B2Apr 13, 2004
Optical proximity correction for phase shifting photolithographic masks
NUMERICAL TECH INC62 citations96
US6670082B2Dec 30, 2003
System and method for correcting 3D effects in an alternating phase-shifting mask
NUMERICAL TECH INC54 citations96
US6584610B1Jun 24, 2003
Incrementally resolved phase-shift conflicts in layouts for phase-shifted features
NUMERICAL TECH INC47 citations96
US6578188B1Jun 10, 2003
Method and apparatus for a network-based mask defect printability analysis system
NUMERICAL TECH INC166 citations96
US6557162B1Apr 29, 2003
Method for high yield reticle formation
NUMERICAL TECH INC49 citations96
US6541165B1Apr 1, 2003
Phase shift mask sub-resolution assist features
NUMERICAL TECH INC57 citations96
US6523165B2Feb 18, 2003
Alternating phase shift mask design conflict resolution
NUMERICAL TECH INC85 citations96
US6658640B2Dec 2, 2003
Simulation-based feed forward process control
NUMERICAL TECH INC85 citations94
US6795168B2Sep 21, 2004
Method and apparatus for exposing a wafer using multiple masks during an integrated circuit manufacturing process
NUMERICAL TECH INC27 citations93
US6785879B2Aug 31, 2004
Model-based data conversion
NUMERICAL TECH INC30 citations93
US6777141B2Aug 17, 2004
Phase shift mask including sub-resolution assist features for isolated spaces
NUMERICAL TECH INC20 citations93
US6763514B2Jul 13, 2004
Method and apparatus for controlling rippling during optical proximity correction
NUMERICAL TECH INC39 citations93
US6653026B2Nov 25, 2003
Structure and method of correcting proximity effects in a tri-tone attenuated phase-shifting mask
NUMERICAL TECH INC37 citations93
US6635393B2Oct 21, 2003
Blank for alternating PSM photomask with charge dissipation layer
NUMERICAL TECH INC26 citations93
US6524752B1Feb 25, 2003
Phase shift masking for intersecting lines
NUMERICAL TECH INC31 citations93
US6523162B1Feb 18, 2003
General purpose shape-based layout processing scheme for IC layout modifications
NUMERICAL TECH INC108 citations93
US6503666B1Jan 7, 2003
Phase shift masking for complex patterns
NUMERICAL TECH INC48 citations93
US6901575B2May 31, 2005
Resolving phase-shift conflicts in layouts using weighted links between phase shifters
NUMERICAL TECH INC34 citations92
US6852471B2Feb 8, 2005
Exposure control for phase shifting photolithographic masks
NUMERICAL TECH INC15 citations92
US6794096B2Sep 21, 2004
Phase shifting mask topography effect correction based on near-field image properties
NUMERICAL TECH INC19 citations92
US6704921B2Mar 9, 2004
Automated flow in PSM phase assignment
NUMERICAL TECH INC25 citations92
US6681379B2Jan 20, 2004
Phase shifting design and layout for static random access memory
NUMERICAL TECH INC29 citations92
US6566019B2May 20, 2003
Using double exposure effects during phase shifting to control line end shortening
NUMERICAL TECH INC46 citations92
US6569583B2May 27, 2003
Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflicts
NUMERICAL TECH INC33 citations91
US6698007B2Feb 24, 2004
Method and apparatus for resolving coloring conflicts between phase shifters
NUMERICAL TECH INC42 citations89
US6553560B2Apr 22, 2003
Alleviating line end shortening in transistor endcaps by extending phase shifters
NUMERICAL TECH INC19 citations89
Showing the top 50 of 70 patents by PatentIndex Score.