Assignee
NUMERICAL TECHNOLOGIES
US5 patents
Top patents by PatentIndex Score
US6887630B2May 3, 2005
Method and apparatus for fracturing polygons on masks used in an optical lithography process
NUMERICAL TECHNOLOGIES12 citations75
US6846617B2Jan 25, 2005
Facilitating optical proximity effect correction through pupil filtering
NUMERICAL TECHNOLOGIES9 citations73
US6821689B2Nov 23, 2004
Using second exposure to assist a PSM exposure in printing a tight space adjacent to large feature
NUMERICAL TECHNOLOGIES10 citations73
US6859918B2Feb 22, 2005
Alleviating line end shortening by extending phase shifters
NUMERICAL TECHNOLOGIES7 citations69
US6795955B2Sep 21, 2004
Method and apparatus for identifying an identical cell in an IC layout with an existing solution
NUMERICAL TECHNOLOGIES12 citations68