Assignee
NUTOOL INC
US46 patents
Top patents by PatentIndex Score
US6867136B2Mar 15, 2005
Method for electrochemically processing a workpiece
NUTOOL INC141 citations99
US6534116B2Mar 18, 2003
Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence
NUTOOL INC136 citations99
US6497800B1Dec 24, 2002
Device providing electrical contact to the surface of a semiconductor workpiece during metal plating
NUTOOL INC144 citations99
US6471847B2Oct 29, 2002
Method for forming an electrical contact with a semiconductor substrate
NUTOOL INC113 citations99
US6413388B1Jul 2, 2002
Pad designs and structures for a versatile materials processing apparatus
NUTOOL INC191 citations99
US6409904B1Jun 25, 2002
Method and apparatus for depositing and controlling the texture of a thin film
NUTOOL INC170 citations99
US6402925B2Jun 11, 2002
Method and apparatus for electrochemical mechanical deposition
NUTOOL INC134 citations99
US6355153B1Mar 12, 2002
Chip interconnect and packaging deposition methods and structures
NUTOOL INC206 citations99
US6328872B1Dec 11, 2001
Method and apparatus for plating and polishing a semiconductor substrate
NUTOOL INC207 citations99
US6251235B1Jun 26, 2001
Apparatus for forming an electrical contact with a semiconductor substrate
NUTOOL INC138 citations99
US6176992B1Jan 23, 2001
Method and apparatus for electro-chemical mechanical deposition
NUTOOL INC664 citations99
US6780772B2Aug 24, 2004
Method and system to provide electroplanarization of a workpiece with a conducting material layer
NUTOOL INC73 citations98
US6630059B1Oct 7, 2003
Workpeice proximity plating apparatus
NUTOOL INC92 citations98
US6352623B1Mar 5, 2002
Vertically configured chamber used for multiple processes
NUTOOL INC131 citations98
US6103628AAug 15, 2000
Reverse linear polisher with loadable housing
NUTOOL INC108 citations98
US6482307B2Nov 19, 2002
Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing
NUTOOL INC126 citations97
US6413403B1Jul 2, 2002
Method and apparatus employing pad designs and structures with improved fluid distribution
NUTOOL INC93 citations97
US6676822B1Jan 13, 2004
Method for electro chemical mechanical deposition
NUTOOL INC53 citations96
US6666959B2Dec 23, 2003
Semiconductor workpiece proximity plating methods and apparatus
NUTOOL INC50 citations96
US6610190B2Aug 26, 2003
Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate
NUTOOL INC65 citations96
US6478936B1Nov 12, 2002
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC46 citations96
US6207572B1Mar 27, 2001
Reverse linear chemical mechanical polisher with loadable housing
NUTOOL INC47 citations96
US6612915B1Sep 2, 2003
Work piece carrier head for plating and polishing
NUTOOL INC74 citations94
US6858121B2Feb 22, 2005
Method and apparatus for filling low aspect ratio cavities with conductive material at high rate
NUTOOL INC35 citations93
US6833063B2Dec 21, 2004
Electrochemical edge and bevel cleaning process and system
NUTOOL INC50 citations93
US6815354B2Nov 9, 2004
Method and structure for thru-mask contact electrodeposition
NUTOOL INC20 citations93
US6797132B2Sep 28, 2004
Apparatus for plating and polishing a semiconductor workpiece
NUTOOL INC17 citations93
US6722946B2Apr 20, 2004
Advanced chemical mechanical polishing system with smart endpoint detection
NUTOOL INC26 citations93
US6692588B1Feb 17, 2004
Method and apparatus for simultaneously cleaning and annealing a workpiece
NUTOOL INC21 citations93
US6582579B1Jun 24, 2003
Methods for repairing defects on a semiconductor substrate
NUTOOL INC34 citations93
US6908374B2Jun 21, 2005
Chemical mechanical polishing endpoint detection
NUTOOL INC43 citations92
US6716084B2Apr 6, 2004
Carrier head for holding a wafer and allowing processing on a front face thereof to occur
NUTOOL INC20 citations92
US6468139B1Oct 22, 2002
Polishing apparatus and method with a refreshing polishing belt and loadable housing
NUTOOL INC26 citations92
US6464571B2Oct 15, 2002
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
NUTOOL INC19 citations92
US6852208B2Feb 8, 2005
Method and apparatus for full surface electrotreating of a wafer
NUTOOL INC20 citations91
US6802946B2Oct 12, 2004
Apparatus for controlling thickness uniformity of electroplated and electroetched layers
NUTOOL INC26 citations91
US6579800B2Jun 17, 2003
Chemical mechanical polishing endpoint detection
NUTOOL INC13 citations84
US6736929B2May 18, 2004
Distributed control system for semiconductor manufacturing equipment
NUTOOL INC13 citations77
US6695962B2Feb 24, 2004
Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs
NUTOOL INC10 citations74
US6649523B2Nov 18, 2003
Method and system to provide material removal and planarization employing a reactive pad
NUTOOL INC10 citations74
US6604988B2Aug 12, 2003
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein
NUTOOL INC8 citations74
US6777338B2Aug 17, 2004
Edge and bevel cleaning process and system
NUTOOL INC7 citations73
US6773576B2Aug 10, 2004
Anode assembly for plating and planarizing a conductive layer
NUTOOL INC5 citations73
US6634935B2Oct 21, 2003
Single drive system for a bi-directional linear chemical mechanical polishing apparatus
NUTOOL INC8 citations73
US6589105B2Jul 8, 2003
Pad tensioning method and system in a bi-directional linear polisher
NUTOOL INC10 citations70
US6932896B2Aug 23, 2005
Method and apparatus for avoiding particle accumulation in electrodeposition
NUTOOL INC2 citations63