Assignee
O'DONNELL ROBERT J
US·3 granted patents·364 citations·filing 2009–2009
Top patents by PatentIndex Score
3 records- 0198US8318327B2Low contamination components for semiconductor processing apparatus and methods for making componentsO'DONNELL ROBERT J·Filed 2009·Granted Nov 27, 2012·363 cites·14 claims
- 0265US8486841B2Corrosion resistant component of semiconductor processing equipment and method of manufacture thereofO'DONNELL ROBERT J·Filed 2009·Granted Jul 16, 2013·1 cites·10 claims
- 0363US8935990B2Low contamination components for semiconductor processing apparatus and methods for making componentsO'DONNELL ROBERT J·Filed 2009·Granted Jan 20, 2015·0 cites·15 claims
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