Assignee
OCTEC INC
JP11 patents
Top patents by PatentIndex Score
US7585386B2Sep 8, 2009
Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
OCTEC INC33 citations91
US7922862B2Apr 12, 2011
Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
OCTEC INC9 citations83
US7383732B2Jun 10, 2008
Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure
OCTEC INC11 citations83
US7686588B2Mar 30, 2010
Liquid chemical supply system having a plurality of pressure detectors
OCTEC INC11 citations81
US7649369B2Jan 19, 2010
Probe and method of manufacturing probe
OCTEC INC7 citations73
US7470998B2Dec 30, 2008
Semiconductor device and method of manufacturing the same
OCTEC INC6 citations73
US7750654B2Jul 6, 2010
Probe method, prober, and electrode reducing/plasma-etching processing mechanism
OCTEC INC5 citations61
US7988429B2Aug 2, 2011
Chemical liquid supply system
OCTEC INC6 citations60
US7942647B2May 17, 2011
Pump for supplying chemical liquids
OCTEC INC3 citations59
US9035453B2May 19, 2015
Semiconductor device
OCTEC INC1 citations50
US7862959B2Jan 4, 2011
Transfer mask for exposure and pattern exchanging method of the same
OCTEC INC0 citations41