Assignee
OESTERR INVESTITIONSKREDIT
AT·4 granted patents·297 citations·filing 1988–1988
Top patents by PatentIndex Score
4 records- 0197US4985634AIon beam lithographyOESTERR INVESTITIONSKREDIT·Filed 1988·Granted Jan 15, 1991·126 cites·51 claims
- 0294US4967088AMethod and apparatus for image alignment in ion lithographyOESTERR INVESTITIONSKREDIT·Filed 1988·Granted Oct 30, 1990·99 cites·49 claims
- 0388US4916322AArrangement for stabilizing an irradiated maskOESTERR INVESTITIONSKREDIT·Filed 1988·Granted Apr 10, 1990·53 cites·26 claims
- 0462US4958074AApparatus and method for inspecting a maskOESTERR INVESTITIONSKREDIT·Filed 1988·Granted Sep 18, 1990·19 cites·23 claims
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