Assignee
OGAWA ARITO
JP4 patents
Top patents by PatentIndex Score
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Semiconductor device, method of manufacturing semiconductor device and system of processing substrate
OGAWA ARITO5 citations83
US8951912B2Feb 10, 2015
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium
OGAWA ARITO4 citations83
US8404603B2Mar 26, 2013
Method of manufacturing semiconductor device and substrate processing system
OGAWA ARITO8 citations83
US8937022B2Jan 20, 2015
Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus
OGAWA ARITO4 citations72