Assignee
OGAWA RIKI
JP3 patents
Top patents by PatentIndex Score
US8797525B2Aug 5, 2014
Pattern inspection apparatus and pattern inspection method
OGAWA RIKI0 citations49
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Light polarization control using serial combination of surface-segmented half wavelength plates
OGAWA RIKI1 citations49
US8755040B2Jun 17, 2014
Illuminating apparatus, pattern inspection apparatus, and method of forming illuminating light
OGAWA RIKI0 citations39