Assignee

OGURO DAI

JP2 patents

Top patents by PatentIndex Score

US8592134B2Nov 26, 2013

Composition for forming base film for lithography and method for forming multilayer resist pattern

OGURO DAI5 citations68

US8324407B2Dec 4, 2012

Alcohol compound having dioxane structure and process for producing same

OGURO DAI0 citations48