Assignee
OH SUNG HYUN
KR·2 granted patents·1 pending application·1 citations·filing 2008–2011
Top patents by PatentIndex Score
3 records- 0153US8158305B2Photomask for extreme ultraviolet lithography and method for fabricating the sameOH SUNG HYUN·Filed 2009·Granted Apr 17, 2012·1 cites·17 claims
- 0243US8163445B2Extreme ultraviolet mask and method for fabricating the sameOH SUNG HYUN·Filed 2008·Granted Apr 24, 2012·0 cites·10 claims
- 0332US2012135340A1Photomask and formation method thereofOH SUNG HYUN·Filed 2011·Application pending·0 cites
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