Assignee
OHSAWA YOUICHI
JP·6 granted patents·77 citations·filing 2009–2012
Top patents by PatentIndex Score
6 records- 0197US8173354B2Sulfonium salt, resist composition, and patterning processOHSAWA YOUICHI·Filed 2010·Granted May 8, 2012·23 cites·8 claims
- 0296US8785105B2Sulfonium salt-containing polymer, resist composition, patterning process, and sulfonium salt monomer and making methodOHSAWA YOUICHI·Filed 2011·Granted Jul 22, 2014·17 cites·16 claims
- 0394US8114570B2Photoacid generator, resist composition, and patterning processOHSAWA YOUICHI·Filed 2009·Granted Feb 14, 2012·15 cites·16 claims
- 0489US8062828B2Positive resist composition and patterning processOHSAWA YOUICHI·Filed 2009·Granted Nov 22, 2011·11 cites·7 claims
- 0587US8535869B2Sulfonium salt, resist composition, and patterning processOHSAWA YOUICHI·Filed 2011·Granted Sep 17, 2013·7 cites·6 claims
- 0683US8815492B2Chemically amplified positive resist composition for ArF immersion lithography and pattern forming processOHSAWA YOUICHI·Filed 2012·Granted Aug 26, 2014·4 cites·6 claims
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