Assignee
OKAMOTO MACHINE TOOL WORKS
US·19 granted patents·2 pending applications·116 citations·filing 1989–2022
Top patents by PatentIndex Score
21 records- 0192US7238087B1Planarizing device and a planarization method for semiconductor substratesOKAMOTO MACHINE TOOL WORKS·Filed 2006·Granted Jul 3, 2007·35 cites·12 claims
- 0291US12318886B2Grinding apparatusOKAMOTO MACHINE TOOL WORKS·Filed 2022·Granted Jun 3, 2025·1 cites·4 claims
- 0390US12068165B2Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor deviceOKAMOTO MACHINE TOOL WORKS·Filed 2022·Granted Aug 20, 2024·2 cites·6 claims
- 0488US10964576B2Electrostatic attachment chuck, method for manufacturing the same, and semiconductor device manufacturing methodOKAMOTO MACHINE TOOL WORKS·Filed 2018·Granted Mar 30, 2021·8 cites·8 claims
- 0588US7214124B2Equipment and method for polishing both sides of a rectangular substrateOKAMOTO MACHINE TOOL WORKS·Filed 2006·Granted May 8, 2007·15 cites·20 claims
- 0681US10556318B2Automatic grinding apparatusOKAMOTO MACHINE TOOL WORKS·Filed 2017·Granted Feb 11, 2020·4 cites·8 claims
- 0779US6183656B1Method of detecting end point of polishing of wafer and apparatus for detecting end point of polishingOKAMOTO MACHINE TOOL WORKS·Filed 2000·Granted Feb 6, 2001·24 cites·5 claims
- 0874US8366514B2Semiconductor substrate planarization apparatus and planarization methodOKAMOTO MACHINE TOOL WORKS·Filed 2010·Granted Feb 5, 2013·4 cites·16 claims
- 0970US7056189B2Grinding method of a workpiece and grinding apparatusOKAMOTO MACHINE TOOL WORKS·Filed 2005·Granted Jun 6, 2006·9 cites·18 claims
- 1064US2023079520A1Substrate grinding device and substrate grinding methodOKAMOTO MACHINE TOOL WORKS·Filed 2022·Application pending·0 cites
- 1156US2022266419A1Grinding method and grinding apparatusOKAMOTO MACHINE TOOL WORKS·Filed 2022·Application pending·0 cites
- 1252US12358095B2Substrate grinding device and substrate grinding methodOKAMOTO MACHINE TOOL WORKS·Filed 2019·Granted Jul 15, 2025·0 cites·8 claims
- 1352US7101080B2Hydrostatic pressure linear guide deviceOKAMOTO MACHINE TOOL WORKS·Filed 2004·Granted Sep 5, 2006·4 cites·2 claims
- 1451US11980997B2Dressing apparatus and polishing apparatusOKAMOTO MACHINE TOOL WORKS·Filed 2021·Granted May 14, 2024·0 cites·9 claims
- 1550US11344993B2Automatic grinding apparatusOKAMOTO MACHINE TOOL WORKS·Filed 2020·Granted May 31, 2022·0 cites·4 claims
- 1649US11745299B2Grinding method of composite substrate including resin and grinding apparatus thereofOKAMOTO MACHINE TOOL WORKS·Filed 2019·Granted Sep 5, 2023·0 cites·6 claims
- 1746US8047897B2Substrate flat grinding deviceOKAMOTO MACHINE TOOL WORKS·Filed 2009·Granted Nov 1, 2011·0 cites·3 claims
- 1845US11735411B2Method and apparatus for manufacturing semiconductor deviceOKAMOTO MACHINE TOOL WORKS·Filed 2019·Granted Aug 22, 2023·0 cites·2 claims
- 1942US10763171B2Method of manufacturing semiconductor apparatusOKAMOTO MACHINE TOOL WORKS·Filed 2019·Granted Sep 1, 2020·0 cites·8 claims
- 2037US5753881AMethod and apparatus for rotating a machining portion of an electrodischarge machineOKAMOTO MACHINE TOOL WORKS·Filed 1996·Granted May 19, 1998·6 cites·17 claims
- 2129US4921471AApparatus for setting a table for a belt-driven machine toolOKAMOTO MACHINE TOOL WORKS·Filed 1989·Granted May 1, 1990·4 cites·4 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →