Assignee
OKITA SHOGO
JP·7 granted patents·3 pending applications·40 citations·filing 2008–2012
Top patents by PatentIndex Score
10 records- 0188US8673166B2Plasma processing apparatus and plasma processing methodOKITA SHOGO·Filed 2009·Granted Mar 18, 2014·17 cites·16 claims
- 0283US8231798B2Plasma processing apparatus and plasma processing methodOKITA SHOGO·Filed 2009·Granted Jul 31, 2012·7 cites·4 claims
- 0379US8303765B2Plasma etching apparatusOKITA SHOGO·Filed 2008·Granted Nov 6, 2012·9 cites·18 claims
- 0478US8883025B2Plasma processing apparatus and plasma processing methodOKITA SHOGO·Filed 2011·Granted Nov 11, 2014·4 cites·4 claims
- 0567US8591754B2Plasma processing apparatus and plasma processing methodOKITA SHOGO·Filed 2012·Granted Nov 26, 2013·1 cites·1 claims
- 0665US9073385B2Plasma processing method for substratesOKITA SHOGO·Filed 2011·Granted Jul 7, 2015·2 cites·8 claims
- 0747US8563332B2Wafer reclamation method and wafer reclamation apparatusOKITA SHOGO·Filed 2008·Granted Oct 22, 2013·0 cites·9 claims
- 0839US2014154832A1Plasma processing apparatus and plasma processing methodOKITA SHOGO·Filed 2012·Application pending·0 cites
- 0935US2012006489A1Plasma processing apparatus and plasma processing methodOKITA SHOGO·Filed 2010·Application pending·0 cites
- 1031US2013068726A1Plasma processing apparatusOKITA SHOGO·Filed 2011·Application pending·0 cites
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