Assignee
OLLIER ERIC
FR2 patents
Top patents by PatentIndex Score
US8183078B2May 22, 2012
Device with integrated circuit and encapsulated N/MEMS and method for production
OLLIER ERIC11 citations81
US8580597B2Nov 12, 2013
Making of a microelectronic device including a monocrystalline silicon NEMS component and a transistor the gate of which is made in the same layer as the mobile structure of this component
OLLIER ERIC7 citations80