Assignee
OLSEN CHRISTOPHER
US·1 granted patent·4 pending applications·23 citations·filing 2004–2011
Top patents by PatentIndex Score
5 records- 0175US8323754B2Stabilization of high-k dielectric materialsOLSEN CHRISTOPHER·Filed 2004·Granted Dec 4, 2012·23 cites·6 claims
- 0247US2007169696A1Two-step post nitridation annealing for lower eot plasma nitrided gate dielectricsOLSEN CHRISTOPHER·Filed 2007·Application pending·0 cites
- 0341US2008032510A1Cmos sion gate dielectric performance with double plasma nitridation containing noble gasOLSEN CHRISTOPHER·Filed 2007·Application pending·0 cites
- 0438US2008090425A9Two-step post nitridation annealing for lower EOT plasma nitrided gate dielectricsOLSEN CHRISTOPHER·Filed 2004·Application pending·0 cites
- 0537US2012222618A1Dual plasma source, lamp heated plasma chamberOLSEN CHRISTOPHER·Filed 2011·Application pending·0 cites
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