Assignee
OMURA YASUHIRO
JP·8 granted patents·2 pending applications·24 citations·filing 2005–2011
Top patents by PatentIndex Score
10 records- 0191US8339578B2Optical system, exposure system, and exposure methodOMURA YASUHIRO·Filed 2010·Granted Dec 25, 2012·11 cites·31 claims
- 0289US8854601B2Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2011·Granted Oct 7, 2014·8 cites·21 claims
- 0380US9086635B2Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2009·Granted Jul 21, 2015·3 cites·14 claims
- 0480US9081295B2Catadioptric projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2011·Granted Jul 14, 2015·2 cites·27 claims
- 0557US9846366B2Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2006·Granted Dec 19, 2017·0 cites·21 claims
- 0651US8436983B2Optical system, exposure system, and exposure methodOMURA YASUHIRO·Filed 2005·Granted May 7, 2013·0 cites·36 claims
- 0747US2008304036A1Catadioptric imaging system, exposure device, and device manufacturing methodOMURA YASUHIRO·Filed 2008·Application pending·0 cites
- 0847US2009046268A1Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2006·Application pending·0 cites
- 0946US8665418B2Projection optical system, exposure apparatus, and device manufacturing methodOMURA YASUHIRO·Filed 2008·Granted Mar 4, 2014·0 cites·20 claims
- 1044US8102508B2Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2005·Granted Jan 24, 2012·0 cites·47 claims
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