Assignee
ONIX MICROSYSTEMS
US5 patents
Top patents by PatentIndex Score
US6330102B1Dec 11, 2001
Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics
ONIX MICROSYSTEMS108 citations98
US6612029B2Sep 2, 2003
Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
ONIX MICROSYSTEMS66 citations95
US6528887B2Mar 4, 2003
Conductive equipotential landing pads formed on the underside of a MEMS device
ONIX MICROSYSTEMS50 citations95
US6437902B2Aug 20, 2002
Optical beam steering switching system
ONIX MICROSYSTEMS15 citations92
US6853779B2Feb 8, 2005
Floating optical carrier
ONIX MICROSYSTEMS0 citations40