Assignee
OOSTERLAKEN THEODORUS G M
NL·2 granted patents·1 pending application·8 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0183US9048271B2Modular semiconductor processing systemOOSTERLAKEN THEODORUS G M·Filed 2011·Granted Jun 2, 2015·8 cites·20 claims
- 0249US9410244B2Semiconductor processing apparatus including a plurality of reactors, and method for providing the same with process gasOOSTERLAKEN THEODORUS G M·Filed 2012·Granted Aug 9, 2016·0 cites·14 claims
- 0336US2012304935A1Bubbler assembly and method for vapor flow controlOOSTERLAKEN THEODORUS G M·Filed 2011·Application pending·0 cites
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