Assignee

ORII TAKEHIKO

JP·2 granted patents·23 citations·filing 2005–2009

Technology mixF26B2 H10P2

Top patents by PatentIndex Score

2 records

0186US8651121B2Substrate processing apparatus, substrate processing method, and storage mediumORII TAKEHIKO·Filed 2009·Granted Feb 18, 2014·13 cites·9 claims
0284US8337659B2Substrate processing method and substrate processing apparatusORII TAKEHIKO·Filed 2005·Granted Dec 25, 2012·10 cites·13 claims

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