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ORIOL INC
US19 patents
Top patents by PatentIndex Score
US6949395B2Sep 27, 2005
Method of making diode having reflective layer
ORIOL INC94 citations99
US6841802B2Jan 11, 2005
Thin film light emitting diode
ORIOL INC89 citations99
US6744196B1Jun 1, 2004
Thin film LED
ORIOL INC171 citations95
US6822202B2Nov 23, 2004
Semiconductor processing temperature control
ORIOL INC65 citations94
US6818532B2Nov 16, 2004
Method of etching substrates
ORIOL INC50 citations94
US6905398B2Jun 14, 2005
Chemical mechanical polishing tool, apparatus and method
ORIOL INC34 citations93
US6586336B2Jul 1, 2003
Chemical-mechanical-polishing station
ORIOL INC24 citations93
US6561881B2May 13, 2003
System and method for chemical mechanical polishing using multiple small polishing pads
ORIOL INC23 citations93
US6835118B2Dec 28, 2004
Rigid plate assembly with polishing pad and method of using
ORIOL INC24 citations91
US7069984B2Jul 4, 2006
Multi-channel temperature control system for semiconductor processing facilities
ORIOL INC15 citations82
US7225864B2Jun 5, 2007
Multi-channel temperature control system for semiconductor processing facilities
ORIOL INC8 citations74
US7186165B2Mar 6, 2007
Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers
ORIOL INC8 citations74
US7104867B2Sep 12, 2006
Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers
ORIOL INC8 citations74
US7004815B2Feb 28, 2006
Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers
ORIOL INC10 citations74
US6949466B2Sep 27, 2005
CMP apparatus and method for polishing multiple semiconductor wafers on a single polishing pad using multiple slurry delivery lines
ORIOL INC11 citations74
US6949177B2Sep 27, 2005
System and method for processing semiconductor wafers using different wafer processes
ORIOL INC9 citations74
US6942545B2Sep 13, 2005
Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers
ORIOL INC9 citations74
US6575818B2Jun 10, 2003
Apparatus and method for polishing multiple semiconductor wafers in parallel
ORIOL INC12 citations74
US7180036B2Feb 20, 2007
Semiconductor processing temperature control
ORIOL INC5 citations60