Assignee
OTSUKA TAKAHISA
JP·4 granted patents·10 citations·filing 2010–2011
Top patents by PatentIndex Score
4 records- 0175US8181356B2Substrate processing methodOTSUKA TAKAHISA·Filed 2010·Granted May 22, 2012·3 cites·6 claims
- 0274US8587763B2Substrate processing method, substrate processing system, and computer-readable recording medium recording program thereonOTSUKA TAKAHISA·Filed 2011·Granted Nov 19, 2013·3 cites·15 claims
- 0372US8247164B2Resist film forming methodOTSUKA TAKAHISA·Filed 2010·Granted Aug 21, 2012·2 cites·14 claims
- 0470US8168378B2Substrate treatment system, substrate treatment method, and computer readable storage mediumOTSUKA TAKAHISA·Filed 2010·Granted May 1, 2012·2 cites·5 claims
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