Assignee
OXFORD INSTR PLASMA TECHNOLOGY
GB·3 granted patents·2 pending applications·6 citations·filing 2001–2006
Top patents by PatentIndex Score
5 records- 0149US7713377B2Apparatus and method for plasma treating a substrateOXFORD INSTR PLASMA TECHNOLOGY·Filed 2004·Granted May 11, 2010·4 cites·34 claims
- 0239US7651552B2Gas port assemblyOXFORD INSTR PLASMA TECHNOLOGY·Filed 2004·Granted Jan 26, 2010·2 cites·22 claims
- 0332US7822494B2Method for generating and using a plasma processing control programOXFORD INSTR PLASMA TECHNOLOGY·Filed 2006·Granted Oct 26, 2010·0 cites·34 claims
- 0430US2002081173A1Apparatus for loading a substrate onto a processing surface in a thin-film processing chamberOXFORD INSTR PLASMA TECHNOLOGY·Filed 2001·Application pending·0 cites
- 0522US2007186854A1Apparatus and method for plasma processingOXFORD INSTR PLASMA TECHNOLOGY·Filed 2004·Application pending·0 cites
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