Assignee

PANAGOPOULOS THEO

US·2 granted patents·215 citations·filing 2010–2012

Technology mixC23C2 H01J2 H10P2 H01L1

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2 records

0194US8133349B1Rapid and uniform gas switching for a plasma etch processPANAGOPOULOS THEO·Filed 2010·Granted Mar 13, 2012·214 cites·8 claims
0261US9011631B2Rapid and uniform gas switching for a plasma etch processPANAGOPOULOS THEO·Filed 2012·Granted Apr 21, 2015·1 cites·15 claims

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