Assignee
PANAGOPOULOS THEODOROS
US·0 granted patents·2 pending applications·0 citations·filing 2007–2012
Technology mixH01J2
Top patents by PatentIndex Score
2 records- 0151US2009139963A1Multiple frequency pulsing of multiple coil source to control plasma ion density radial distributionPANAGOPOULOS THEODOROS·Filed 2007·Application pending·0 cites
- 0242US2013256271A1Methods and apparatuses for controlling plasma in a plasma processing chamberPANAGOPOULOS THEODOROS·Filed 2012·Application pending·0 cites
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