Assignee
PAPASOULIOTIS GEORGE D
US·4 granted patents·1 pending application·51 citations·filing 2010–2012
Top patents by PatentIndex Score
5 records- 0195US9123509B2Techniques for plasma processing a substratePAPASOULIOTIS GEORGE D·Filed 2011·Granted Sep 1, 2015·39 cites·19 claims
- 0285US8202792B2Method of processing a substrate having a non-planar surfacePAPASOULIOTIS GEORGE D·Filed 2010·Granted Jun 19, 2012·7 cites·4 claims
- 0373US8679960B2Technique for processing a substrate having a non-planar surfacePAPASOULIOTIS GEORGE D·Filed 2010·Granted Mar 25, 2014·3 cites·21 claims
- 0470US8507372B2Method for processing a substrate having a non-planar substrate surfacePAPASOULIOTIS GEORGE D·Filed 2012·Granted Aug 13, 2013·2 cites·17 claims
- 0549US2012263887A1Technique and apparatus for ion-assisted atomic layer depositionPAPASOULIOTIS GEORGE D·Filed 2011·Application pending·0 cites
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