Assignee
PARAM CORP
JP·3 granted patents·4 citations·filing 2012–2020
Top patents by PatentIndex Score
3 records- 0173US8878143B2Electron beam lithography device and lithographic methodPARAM CORP·Filed 2012·Granted Nov 4, 2014·3 cites·11 claims
- 0266US9418815B2Tubular permanent magnet used in a multi-electron beam devicePARAM CORP·Filed 2014·Granted Aug 16, 2016·1 cites·4 claims
- 0350US11295925B2Electron gun devicePARAM CORP·Filed 2020·Granted Apr 5, 2022·0 cites·18 claims
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