Assignee

PASIM MIKROSYSTEMTECHNIK GMBH

DE·1 granted patent·15 citations·filing 1995–1995

Technology mixH02K1

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0135US5841207AModular two-coordinate planar motorPASIM MIKROSYSTEMTECHNIK GMBH·Filed 1995·Granted Nov 24, 1998·15 cites·6 claims

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