Assignee
PATEL HRISHIKESH
NL·2 granted patents·5 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0176US8472003B2Fluid handling structure, lithographic apparatus and device manufacturing methodPATEL HRISHIKESH·Filed 2010·Granted Jun 25, 2013·5 cites·24 claims
- 0247US9618858B2Lithographic apparatus and a device manufacturing method involving thermal conditioning of a tablePATEL HRISHIKESH·Filed 2011·Granted Apr 11, 2017·0 cites·21 claims
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