Assignee
PATRA MICHAEL
DE4 patents
Top patents by PatentIndex Score
US9046786B2Jun 2, 2015
Illumination system of a microlithographic projection exposure apparatus
PATRA MICHAEL5 citations82
US8593645B2Nov 26, 2013
Microlithographic projection exposure apparatus and related method
PATRA MICHAEL2 citations61
US8896816B2Nov 25, 2014
Projection exposure method, projection exposure apparatus, laser radiation source and bandwidth narrowing module for a laser radiation source
PATRA MICHAEL1 citations51
US8724080B2May 13, 2014
Optical raster element, optical integrator and illumination system of a microlithographic projection exposure apparatus
PATRA MICHAEL1 citations51